Considered measurements enable the general picture of ferroelectric film properties on microwave to be obtained and the potentiality of the film application in devices operating in any frequency subranges of modern microwave microelectronics to be estimated.
Analysis of results of electrodeless measurements and measurements with electrodes makes it possible:

MEASURING DEVICE No. 1  
LBAND STRIPLINE RESONATOR  
PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  1  2  planar capacitors 
Capacitance, pF  0.1  2  
Dielectric Constant  *)  
Loss Tangent  0.003  0.1  
Bias Voltage Dependencies  Yes, up to 300 V 
*)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 2  
LBAND MICROSTRIP RESONATOR  
PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  1  2  planar capacitors 
Capacitance, pF  0.25  4.5  
Dielectric Constant  *)  
Loss Tangent  0.01  0.2  
Bias Voltage Dependencies  Yes, up to 300 V 
*)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 3  
L/S BAND MICROSTRIP RESONATOR  
PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  2  3  planar capacitors 
Capacitance, pF  0.3  3  
Dielectric Constant  *)  
Loss Tangent  0.01  0.2  
Bias Voltage Dependencies  Yes, up to 300 V 
*)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 4  
XBAND SUSPENDED SUBSTRATE RESONATOR 

PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  7  9  planar capacitors 
Capacitance, pF  0.2  2  
Dielectric Constant  *)  
Loss Tangent  0.005  0.1  
Bias Voltage Dependencies  Yes, up to 300 V 
*)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 5  
K/KaBAND TEST FIXTURE (selfresonance of varactor) 

PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  18  40  planar capacitors 
Capacitance, pF  0.1  0.8  
Dielectric Constant  *)  
Loss Tangent  0.01  0.1  
Bias Voltage Dependencies  Yes, up to 400 V 
*)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 6  
K/KaBAND TEST FIXTURE  
PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  19  21; 2730  planar capacitors 
Capacitance *), pF  0.1  1.0  
Dielectric Constant  **)  
Loss Tangent  0.005  0.2  
Bias Voltage Dependencies  Yes, up to 400 V 
*)  two varactors of equal capacitance are concurrently under testing;
**)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 7  
KaBAND PARTIALLY FILLED WAVEGUIDE RESONATOR (electrodeless measurements) 

PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  2735  dielectric plates 
Capacitance, pF    
e_{FE} x d_{FE} , µm *)  >2000  
Loss Tangent  0.005  0.1  
Bias Voltage Dependencies  No 
*) e_{FE}  ferroelectric film dielectric constant, d_{FE}  ferroelectric film thickness.
MEASURING DEVICE No. 8  
KaBAND RING SUSPENDED SUBSTRATE RESONATOR 

PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  2831  planar capacitors 
Capacitance *), pF  0.1  0.6  
Dielectric Constant  **)  
Loss Tangent  0.005  0.2  
Bias Voltage Dependencies  Yes, up to 400 V 
*)  two varactors of equal capacitance are concurrently under testing;
*)  dielectric constant is calculated from the capacitance measurements.
MEASURING DEVICE No. 9  
VBAND PARTIALLY FILLED WAVEGUIDE RESONATOR (electrodeless measurements) 

PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  5078  dielectric plates 
Capacitance, pF    
e_{FE} x d_{FE} , µm *)  >500  
Loss Tangent  0.01  0.1  
Bias Voltage Dependencies  No 
*) e_{FE}  ferroelectric film dielectric constant, d_{FE}  ferroelectric film thickness.
MEASURING DEVICE No. 10  
U/VBAND OPEN RESONATOR (electrodeless measurements) 

PARAMETER  RANGE  THE STRUCTURES TO BE TESTED 
Frequency, GHz  4078  dielectric plates **) 
Capacitance, pF    
Dielectric Constant  200  1000 *)  
Loss Tangent  0.001  0.1  
Bias Voltage Dependencies  No 
*)  lower values of ferroelectric film dielectric constant can be measured for higher film thickness;
**)  the measurements are possible for the specimens of any shape at minimal sizes to be not less than 24 mm.